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Swagelok Austria

Your Authorized Swagelok Sales and Service Center

ALD7 - the latest innovation in atomic layer deposition valve technology

The Swagelok ALD7 valve features faster response times, thermal stability at high temperatures, and improved corrosion resistance. It delivers reliable valve to valve, dose to dose, and chamber-to-chamber performance for very long cycle times.

ALD7 Valve

Specifications

Working Pressure Vacuum to 145 psig (10.0 bar)
Burst Pressure >3200 psig (220 bar)
Actuation Pressure 60 to 120 psig (4.1 to 8.27 bar)
Temperature Rating Valve body from 32°F (0°C) to 392°F (200°C)
Actuator from 32°F (0°C) to 302°F (150°C)
Flow Coefficient 0.7 Cv
Body Materials 316L VIM-VAR stainless steel
Diaphragm Material Cobalt-based superalloy
End Connections
Type VCR®fittings
Tube butt weld
1.5 in. modular surface-mount high flow C-seal

 

For more information about the ALD7 valve, click here.

Learn how to solve ALD semiconductorprocessing challenges or how the right valve can improve accuracy and consistency in your ALD process.

Do you have questions or need support in product selection? We are happy to assist you.
E-Mail | Phone 056 485 61 61