ALD7
ALD7 - the latest innovation in atomic layer deposition valve technology
The Swagelok ALD7 valve features faster response times, thermal stability at high temperatures, and improved corrosion resistance. It delivers reliable valve to valve, dose to dose, and chamber-to-chamber performance for very long cycle times.
Specifications
| Working Pressure | Vacuum to 145 psig (10.0 bar) |
| Burst Pressure | >3200 psig (220 bar) |
| Actuation Pressure | 60 to 120 psig (4.1 to 8.27 bar) |
| Temperature Rating | Valve body from 32°F (0°C) to 392°F (200°C) Actuator from 32°F (0°C) to 302°F (150°C) |
| Flow Coefficient | 0.7 Cv |
| Body Materials | 316L VIM-VAR stainless steel |
| Diaphragm Material | Cobalt-based superalloy |
| End Connections | |
| Type | VCR®fittings Tube butt weld 1.5 in. modular surface-mount high flow C-seal |
For more information about the ALD7 valve, click here.
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